Atomically ordered HfO2/ZrO2 superlattices sustain ferroelectricity to 100 nm, more than ten times thicker than conventional hafnia films.
Grain size engineering for ferroelectric Hf0.5Zr0.5O2 films by an insertion of Al2O3 interlayer
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Enhancing ferroelectric stability: Wide-range of adaptive control in epitaxial HfO2/ZrO2 superlattices
Atomically ordered HfO2/ZrO2 superlattices sustain ferroelectricity to 100 nm, more than ten times thicker than conventional hafnia films.