Monolithic Si3N4 platform achieves EPR fidelity 0.9875(3), HOM visibility 0.990(6), and four-photon GHZ fidelity 0.943(8) at 27 Hz—more than 100x prior silicon-photonic rates—using CMOS-compatible 150 mm wafer fabrication.
Science391(6785), 592–597 (2026)
2 Pith papers cite this work. Polarity classification is still indexing.
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