Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.
Quality factors in micron- and submicron-thick can- tilevers
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Cryogenic Loss Limits in Microwave Epitaxial AlN Acoustic Resonators
Measurements of Q in an epitaxial AlN FBAR show monotonic decrease from ~1589 at 6.5 K to 363 at 294 K, matching a model combining intrinsic losses and analytical anchor-radiation loss, validated against prior HBAR data.