Model-based statistical analysis identifies Al film thickness fluctuations as the dominant source of critical current variation in Al/AlOx/Al Josephson junctions, with 30-degree deposition improving uniformity to 1.2% RSD over 9.75 mm.
\'O Peat\'ain , author T
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Geometric dependence of critical-current variation in Al/AlO${\rm _x}$/Al Josephson junctions: a model-based analysis
Model-based statistical analysis identifies Al film thickness fluctuations as the dominant source of critical current variation in Al/AlOx/Al Josephson junctions, with 30-degree deposition improving uniformity to 1.2% RSD over 9.75 mm.