Surface modification experiments on SiNx resonators indicate that hydroxyl groups contribute to mechanical dissipation and that silanization can reduce it.
Timarac-Popovi ´c, J
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HF Etching and Silanization: Evidence for the Role of Surface Hydroxyl Groups in Silicon Nitride Resonator Loss
Surface modification experiments on SiNx resonators indicate that hydroxyl groups contribute to mechanical dissipation and that silanization can reduce it.