A lithography-free process combining Ga FIB milling, carbon deposition, and annealing produces deterministic hBN single-photon emitter arrays with 89% yield and g^(2)(0)=0.15.
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Deterministic Single-Photon Emitter Arrays in Hexagonal Boron Nitride by Carbon-Assisted Focused Ion Beam Engineering
A lithography-free process combining Ga FIB milling, carbon deposition, and annealing produces deterministic hBN single-photon emitter arrays with 89% yield and g^(2)(0)=0.15.