Monolithic 120 nm X-cut BTO on silicon enables laterally excited S0 Lamb-mode resonators with 25.1% electromechanical coupling, Q of 175, and 2.3-5.6% frequency tunability near 700 MHz.
Field and temperature dependent parameters of the dc field induced resonances in BaxSr1-xTiO3-based tunable thin film bulk acoustic resonators
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High Coupling Tunable Acoustic Resonators in Monolithic Barium Titanate
Monolithic 120 nm X-cut BTO on silicon enables laterally excited S0 Lamb-mode resonators with 25.1% electromechanical coupling, Q of 175, and 2.3-5.6% frequency tunability near 700 MHz.