A fluid-model study of electronegative Ar/SF6 plasma claims three discharge regimes, with a new 'self-coagulation' mechanism producing delta-shaped anion density profiles.
Principles of Plasma Dis charges and Materials processing , 2nd ed.; Wiley-Interscience: New York, America, 2005; pp
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Discharge structure theory of highly electronegative plasma and its hierarchy and interdisciplinary meanings
A fluid-model study of electronegative Ar/SF6 plasma claims three discharge regimes, with a new 'self-coagulation' mechanism producing delta-shaped anion density profiles.