Epitaxial piezoelectric alpha-quartz nanopillars down to 50 nm wide and up to 2 micrometers tall were patterned on silicon while preserving crystallinity and piezoelectric response.
Such procedures do not require any lithographic mask and allow obtaining a large scale and precise control of epitaxial quartz nanostructures (see Fig
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Nanostructure engineering of epitaxial piezoelectric {\alpha}-quartz thin films on silicon
Epitaxial piezoelectric alpha-quartz nanopillars down to 50 nm wide and up to 2 micrometers tall were patterned on silicon while preserving crystallinity and piezoelectric response.