Laser annealing of 90 nm SALD ZnO films on glass achieves 0.09 Ohm cm resistivity and oxygen sensitivity at optimized 0.21 uJ/pulse and 1 micron hatching parameters.
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Laser Annealing of Transparent ZnO Thin Films: A Route to Improve Electrical Conductivity and Oxygen Sensing Capabilities
Laser annealing of 90 nm SALD ZnO films on glass achieves 0.09 Ohm cm resistivity and oxygen sensitivity at optimized 0.21 uJ/pulse and 1 micron hatching parameters.