Radiation-hydrodynamic simulations of tin plasmas predict a global maximum EUV conversion efficiency of 5.63% at 5.5 μm laser wavelength, with 4.64% at the practical 2 μm wavelength.
Atomic modeling of the plasma
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Optimization of EUV output by experimentally validated radiation-hydrodynamic simulations across a broad laser parameter space
Radiation-hydrodynamic simulations of tin plasmas predict a global maximum EUV conversion efficiency of 5.63% at 5.5 μm laser wavelength, with 4.64% at the practical 2 μm wavelength.