Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
& Harada, S.Focused light birefringence for three- dimensional observation of dislocations in sili- con carbide wafers
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Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.