A fluid-model study of electronegative Ar/SF6 plasma claims three discharge regimes, with a new 'self-coagulation' mechanism producing delta-shaped anion density profiles.
Numerical investigation of ion energy distribution and ion angle distribution in a dual -frequency capacitively coupled plasma with a hybrid model
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Discharge structure theory of highly electronegative plasma and its hierarchy and interdisciplinary meanings
A fluid-model study of electronegative Ar/SF6 plasma claims three discharge regimes, with a new 'self-coagulation' mechanism producing delta-shaped anion density profiles.