A SIMOX-based fabrication flow is introduced that yields suspended single-crystal silicon resonators as small as 0.1-0.2 µm with measured fundamental resonances up to 110 MHz.
Title resolution pending
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
cond-mat.mes-hall 1years
2025 1verdicts
CONDITIONAL 1representative citing papers
citing papers explorer
-
Nanoscale Mechanical Structures Fabricated from Silicon-on-Insulator Substrates
A SIMOX-based fabrication flow is introduced that yields suspended single-crystal silicon resonators as small as 0.1-0.2 µm with measured fundamental resonances up to 110 MHz.