Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
& Hu, Z.-l.Deep learning-based detection of dislocation defects in 4H-SiC substrates via enhanced photoluminescence imaging
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Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.