Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.
& Rana, T.PL Signatures from Decoration of Dis- locations in SiC Substrates and Epitaxial Wafers
1 Pith paper cite this work. Polarity classification is still indexing.
1
Pith paper citing it
fields
physics.optics 1years
2026 1verdicts
UNVERDICTED 1representative citing papers
citing papers explorer
-
Confocal Subsurface Backscattering Microscopy for Optical Identification of Nanoscale Threading Dislocations in SiC Substrates
Confocal subsurface backscattering microscopy detects and classifies nanoscale threading dislocations in SiC substrates via confocal dark-field filtering and photoelastic scattering from strain-induced index perturbations.