Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.
D.et al.Tri-layer silicon nitride-on-silicon photonic platform for ultra-low-loss crossings and inter- layer transitions.Optics express25, 30862–30875 (2017)
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Building reliable 3D photonic integrated circuits and cavities at the wafer scale
Wafer-scale 3D SiN photonic circuits are demonstrated with 0.068-0.077 dB/cm waveguide loss and 6 mdB 3D transitions using E-CMP planarization and κ-engineered tapers, plus the first 3D high-Q cavities.