Femtosecond laser machining of ITO films shows LIPSS orientation affects resistivity, with perpendicular structures raising resistance by a factor above two for 515 nm light while 343 nm light thins the film at boundaries.
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Laser annealing of 90 nm SALD ZnO films on glass achieves 0.09 Ohm cm resistivity and oxygen sensitivity at optimized 0.21 uJ/pulse and 1 micron hatching parameters.
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Influence of edge Laser-Induced Periodic Surface Structures (LIPSS) on the electrical properties of fs laser-machined ITO microcircuits
Femtosecond laser machining of ITO films shows LIPSS orientation affects resistivity, with perpendicular structures raising resistance by a factor above two for 515 nm light while 343 nm light thins the film at boundaries.
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Laser Annealing of Transparent ZnO Thin Films: A Route to Improve Electrical Conductivity and Oxygen Sensing Capabilities
Laser annealing of 90 nm SALD ZnO films on glass achieves 0.09 Ohm cm resistivity and oxygen sensitivity at optimized 0.21 uJ/pulse and 1 micron hatching parameters.