On proprietary SEM wafer images, unsupervised domain adaptation methods such as offline pseudo-labeling and AdaMatch improve defect classification accuracy across product technologies, but the proposed DBACS method often underperforms the no-adaptation baseline.
Predictive maintenance in the industry: A comparative study on deep learning-based remaining useful life estimation
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Domain Adaptation for Image Classification of Defects in Semiconductor Manufacturing
On proprietary SEM wafer images, unsupervised domain adaptation methods such as offline pseudo-labeling and AdaMatch improve defect classification accuracy across product technologies, but the proposed DBACS method often underperforms the no-adaptation baseline.