ref [39] · 2508.16768 · notice #10520 · dispute
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author author A. Chernikova , author M. Kozodaev , author A. Markeev , author Y. Matveev , author D. Negrov , \ and\ author O. Orlov ,\ https://doi.org/10.1016/j.mee.2015.04.024 journal journal Microelectronic Engineering \ volume 147 ,\ pages 15 ( year 2015 ) ,\ note insulating Films on Semiconductors 2015 NoStop
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author author A. Chernikova, author M. Kozodaev, author A. Markeev, author Y. Matveev, author D. Negrov, and author O. Orlov, https://doi.org/10.1016/j.mee.2015.04.024 journal journal Microelectronic Engineering volume 147, pages 15 ( year 2015 ), note insulating Films on Semiconductors 2015