Suspension of Nanoparticles in SU-8 and Characterization of Nanocomposite Properties

Gold nanospheres, single wall carbon nanotubes (SWNT), and diamonoids were phyically incorporated into the negative photoresist SU-8. the mixtures were spin cast onto silicon or aluminium coated silicon wafers. ASTM standard D638 tensile specimens were lithographically patterned in the materials and then released from the substrate using Microchem'Omnicoat or an anodic metal dissolution process. the residual stresses, elastic moduli, and viscosity of the SU-8. Resistivity measurements of SU-8/SWNT nanocomposites were also investigates. We found the effective modulus and viscosity of the SU-8 test specimens decreases with the addition of diamantane and SWNTs. Additionally, the SU-8/SWNT nanocomposites showed changes in resistivity with increased strain, suggesting a gauge factor for the 1 wt% SU-8/SWNT nanocomposite of approximately 2-4.