Accurate simulation of light transmission through subwavelength apertures in metal films

We use the finite-element method for simulating light transmission through a 2D-periodic array of rectangular apertures in a film of highly conductive material. We report results with a relative error of the transmissivity lower than 0.01%. This is an improvement of about one order of magnitude compared to previously reported results. Further, the influence of corner and edge roundings on light transmission through the subwavelength apertures is investigated.