Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides

Optical resonances in 1D photonic crystal microcavities are investigated numerically using finite-element light scattering and eigenmode solvers. The results are validated by comparison to experimental and theoretical findings from the literature. The influence of nanometer-scale geometry variations on the resonator performance is studied. Limiting factors to ultra-high Q-factor performance are identified.