Inductance measurement of YBCO strip-lines made by ion irradiation

We have investigated the electrodynamic properties of High-Tc strip-lines made by ion irradiation, in order to evaluate the potentialities of such a technology for RSFQ superconductor digital electronic. SQUID loops of different length and width have been fabricated by ion bombardment of 70 nm thick films through e-beam lithographied shadow masks, and measured at different temperatures. The voltage modulations have been recorded by direct injection of a control current in the SQUIDs arms. The corresponding line inductances have been measured and compared with 3D simulations. A quantitative agreement has been obtained leading to typical values of 0.4 pH/microns without ground plane.