Monitoring the formation of oxide apertures in micropillar cavities
classification
⚛️ physics.optics
quant-ph
keywords
micropillaroxidationcavitiesmonitoringopticaloxidethermalalas
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read the original abstract
An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector (DBR) mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.
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