X-ray photon detection using superconducting resonators in thermal quasi-equilibrium

Superconducting resonators have to date been used for photon detection in a non-equilibrium manner. In this paper, we demonstrate that such devices can also be used in a thermal quasi-equilibrium manner to detect X-ray photons. We have used a resonator to measure the temperature rise induced by an X-ray photon absorbed in normal metal and superconducting absorbers on continuous and perforated silicon nitride membranes. We observed two distinct pulses with vastly different decay times. We attribute the shorter pulses to non-equilibrium quasiparticle relaxation and the longer pulses to a thermal relaxation process. In addition, we have measured the temperature dependence of the X-ray induced temperature rise and decay times. Finally, we have measured the resonator sensitivity and energy resolution. Superconducting resonators used in a thermal quasi-equilibrium manner have the potential to be used for X-ray microcalorimetry.