Niobium-based superconducting nano-devices fabrication using all-metal suspended masks

S. Samaddar , D. van Zanten , A. Fay , B. Sac\'ep\'e , H. Courtois , C.B. Winkelmann

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classification ❄️ cond-mat.mes-hall

keywords fabricationsuperconductingniobiumall-metalcharacterizationdemonstrateddifficultieshigh-quality

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We report a novel method for the fabrication of superconducting nanodevices based on niobium. The well-known difficulties of lithographic patterning of high-quality niobium are overcome by replacing the usual organic resist mask by a metallic one. The quality of the fabrication procedure is demonstrated by the realization and characterization of long and narrow superconducting lines and niobium-gold-niobium proximity SQUIDs.

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Niobium-based superconducting nano-devices fabrication using all-metal suspended masks

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