Pulse force nanolithography on hard surfaces using atomic force microscopy with a sharp single-crystal diamond tip

AFM-based technique of nanolithography is proposed. The method enables rapid point by point indentation with a sharp tip. When used in tandem with single-crystal diamond tips, this technique allows the creation of high aspect ratio grooves in hard materials, such as silicon or metals. Examples of fabricated groove arrays on Si surface with 30-100 nm pitches and 5-32 nm depths are presented. Cutting of a 63nm thick metal magnetic film demonstrated. The resulting structure is studied by use of magnetic force microscopy.