hp-finite element method for simulating light scattering from complex 3D structures
classification
⚛️ physics.optics
physics.comp-ph
keywords
highlightmethodscatteringsimulatingaccuracyaccurateadaptive
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Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.
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