High spatial frequency laser induced periodic surface structure formation in germanium by mid-IR femtosecond pulses

Formation of high spatial frequency laser induced periodic surface structures (HSFL) in germanium by femtosecond mid-IR pulses with wavelengths between $\lambda=2.0$ and $3.6 \; \mathrm{\mu m}$ was studied with varying angle of incidence and polarization. The period of these structures varied from $\lambda/3$ to $\lambda/8$. A modified surface-scattering model including Drude excitation and the optical Kerr effect explains spatial period scaling of HSFL across the mid-IR wavelengths. Transmission electron microscopy (TEM) shows the presence of a $30 \; \mathrm{n m}$ amorphous layer above the structure of crystalline germanium. Various mechanisms including two photon absorption and defect-induced amorphization are discussed as probable causes for the formation of this layer.