Oxide-mediated self-limiting recovery of field effect mobility in plasma-treated MoS₂

Precise tunability of electronic properties of 2D nanomaterials is a key goal of current research in this field of materials science. Chemical modification of layered transition metal dichalcogenides leads to the creation of heterostructures of low-dimensional variants of these materials. In particular, the effect of oxygen-containing plasma treatment on molybdenum disulfide (MoS$_2$) has long been thought to be detrimental to the electrical performance of the material. Here we show that the mobility and conductivity of MoS$_2$ can be precisely controlled and improved by systematic exposure to oxygen:argon plasma, and characterise the material utilising advanced spectroscopy and microscopy. Through complementary theoretical modelling which confirms conductivity enhancement, we uncover the role of a two-dimensional phase of molybdenum trioxide (2D-MoO$_3$) in improving the electronic behaviour of the material. Deduction of the beneficial role of MoO$_3$ will serve to open the field to new approaches with regard to the tunability of 2D semiconductors by their low-dimensional oxides in nano-modified heterostructures.