Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator

We develop a stoichiometric SiN membrane-based optoelectromechanical system, in which the properties of the mechanical resonator can be dynamically controlled by the piezoelectric actuation. The mode splitting is observed in the mechanical response spectra of a phase-sensitive degenerate parametric amplifier. In addition, the quality factor Q of the membrane oscillator in this process is signicantly enhanced by more than two orders of magnitude due to the coherent amplication, reaching a Q factor of ~ 3*10^8 and a f*Q product of ~ 8*10^14 at room temperature. The thermomechanical noise squeezing close to -3 dB limitation is also achieved. This system integrates the electrical, optical and mechanical degrees of freedom without compromising the exceptional material properties of SiN membranes, and can be a useful platform for studying cavity optoelectromechanics.