Sensitive spin detection using an on-chip SQUID-waveguide resonator

Precise detection of spin resonance is of paramount importance to achieve coherent spin control in quantum computing. We present a novel setup for spin resonance measurements, which uses a dc-SQUID flux detector coupled to an antenna from a coplanar waveguide. The SQUID and the waveguide are fabricated from 20~nm Nb thin film, allowing high magnetic field operation with the field applied parallel to the chip. We observe a resonance signal between the first and third excited states of Gd spins $S=7/2$ in a CaWO$_4$ crystal, relevant for state control in multi-level systems.