TEM Nanosculpting of Topological Insulator Bi₂Se₃

We present a process for sculpting Bi$_2$Se$_3$ nanoflakes into application-relevant geometries using a high resolution transmission electron microscope. This process takes several minutes to sculpt small areas and can be used to cut the Bi$_2$Se$_3$ into wires and rings, to thin areas of the Bi$_2$Se$_3$, and to drill circular holes and lines. We determined that this method allows for sub 10-nm features and results in clean edges along the drilled regions. Using in-situ high-resolution imaging, selected area diffraction, and atomic force microscopy, we found that this lithography process preserves the crystal structure of Bi$_2$Se$_3$. TEM sculpting is more precise and potentially results in cleaner edges than does ion-beam modification; therefore, the promise of this method for thermoelectric and topological devices calls for further study into the transport properties of such structures.