In-air ion beam analysis with high spatial resolution proton microbeam

One of the possible ways to maintain the micrometer spatial resolution while performing ion beam analysis in the air is to increase the energy of ions. In order to explore capabilities and limitations of this approach, we have tested a range of proton beam energies (2 - 6 MeV) using in-air STIM (Scanning Ion Transmission Microscopy) setup. Measurements of the spatial resolution dependence on proton energy have been compared with SRIM simulation and modelling of proton multiple scattering by different approaches. Results were used to select experimental conditions in which 1 micrometer spatial resolution could be obtained. High resolution in-air microbeam could be applied for IBIC (Ion Beam Induced Charge) tests of large detectors used in nuclear and high energy physics that otherwise can not be tested in relatively small microbeam vacuum chambers.