REVIEW
Integrating Graphene into Semiconductor Fabrication Lines
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pith:XXXXXXXX · record.json · timestamp
classification
cond-mat.mes-hall
keywords
fabricationgraphenematerialsemiconductorcommercializationcriticaldeviceselectronic
read the original abstract
Electronic and photonic devices based on the two-dimensional material graphene have unique properties, leading to outstanding performance figures-of-merit. Mastering the integration of this new and unconventional material into an established semiconductor fabrication line represents a critical step for pushing it forward towards commercialization.
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