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Monolithic all-Silicon Flat lens for broadband LWIR Imaging

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arxiv 2103.14939 v1 pith:EAD4PPUF submitted 2021-03-27 physics.optics

Monolithic all-Silicon Flat lens for broadband LWIR Imaging

classification physics.optics
keywords lensflatlwironlysiliconactiveall-siliconbroadband
verification ladder T0 review T1 audit T2 compute T3 formal T4 reserved
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We designed, fabricated and characterized a flat multi-level diffractive lens (MDL) comprised of only silicon with diameter = 15.2mm, focal length of 19mm, and operating over the longwave infrared (LWIR) spectrum of 8um to 14um. We experimentally demonstrated field of view of 46deg, depth of focus >7mm and wavelength-averaged Strehl ratio of 0.46. All these metrics were comparable to those of a conventional refractive lens. The active device thickness is only 8um and its weight (including the silicon substrate) is less than 0.2g.

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