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arxiv: 2309.16551 · v1 · pith:3FILRTFAnew · submitted 2023-09-28 · ❄️ cond-mat.mtrl-sci · physics.app-ph· physics.optics

Epitaxial lattice-matched Al_(0.89)Sc_(0.11)N/GaN distributed Bragg reflectors

classification ❄️ cond-mat.mtrl-sci physics.app-phphysics.optics
keywords lattice-matchedbraggreflectivityreflectorsalscndbrsdeltadistributed
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We demonstrate epitaxial lattice-matched Al$_{0.89}$Sc$_{0.11}$N/GaN ten and twenty period distributed Bragg reflectors (DBRs) grown on c-plane bulk n-type GaN substrates by plasma-enhanced molecular beam epitaxy (PA-MBE). Resulting from a rapid increase of in-plane lattice coefficient as scandium is incorporated into AlScN, we measure a lattice-matched condition to $c$-plane GaN for a Sc content of just 11\%, resulting in a large refractive index mismatch $\mathrm{\Delta n}$ greater than 0.3 corresponding to an index contrast of $\mathrm{\Delta n/n_{GaN}}$ = 0.12 with GaN. The DBRs demonstrated here are designed for a peak reflectivity at a wavelength of 400 nm reaching a reflectivity of 0.98 for twenty periods. It is highlighted that AlScN/GaN multilayers require fewer periods for a desired reflectivity than other lattice-matched Bragg reflectors such as those based on AlInN/GaN multilayers.

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