Fabrication and Characterization of Impedance-transformed Josephson Parametric Amplifier

In this paper, we introduce a method of using a double-layer resist lift-off process to prepare the capacitor dielectric layer for fabricating impedance-engineered Josephson parametric amplifiers (IMPAs). Compared with traditional techniques, this method enhances fabrication success rate, accelerates production. The IMPA we made experimentally achieves an instantaneous bandwidth over 950 (600) MHz with a gain exceeding 10 (14) dB, along with saturation input power of -115 dBm and near quantum-limited noise. We demonstrate the negligible backaction from the IMPA on superconducting qubits, resulting in no significant degradation of the relaxation time and coherence time of the qubits. The IMPA improves the signal-to-noise ratio from 1.69 to 14.56 and enables the amplification chain to achieve a high quantum efficiency with $\eta \approx 0.26$, making it a critical necessity for large-scale quantum computation.