A variability-aware simulation and design workflow for wafer-scale, heterogeneously integrated lithium niobate modulators

We present a variability-aware simulation framework for heterogeneously integrated lithium niobate traveling-wave modulators. The framework incorporates fabrication-variation data obtained from our dedicated pilot line and enables efficient optimisation of geometric parameters to ensure stable device performance across wafer-scale manufacturing. Using this methodology, we theoretically demonstrate that reliable wafer-scale integration of LN modulators on silicon photonics via micro-transfer printing is feasible and can be systematically engineered.