Reflection High-Energy Electron Diffraction oscillations during epitaxial growth of artificially layered films of (BaCuOx)m /(CaCuO2)n

Pulsed Laser Deposition in molecular-beam epitaxy environment (Laser-MBE) has been used to grow high quality BaCuOx/CaCuO2 superlattices. In situ Reflection High Energy Electron Diffraction (RHEED) shows that the growth mechanism is 2-dimensional. Furthermore, weak but reproducible RHEED intensity oscillations have been monitored during the growth. Ex-situ x-ray diffraction spectra confirmed the growth rate deduced from RHEED oscillations. Such results demonstrate that RHEED oscillations can be used, even for (BaCuOx)2/(CaCuO2)2 superlattices, for phase locking of the growth.