Influence of fractional composition of crystallite grains on the dark conductivity in fully crystallized undoped microcrystalline silicon

Improvement in film growth technology requires a knowledge of the correlation between microstructural and deposition parameters with electrical properties in hydrogenated microcrystalline Si films. Our study indicates that fractional compositions of the constituent crystallite grains in fully crystallized undoped microcrystalline Si films is a unique microstructural feature that defines the film microstructure and can be well correlated to the electrical transport properties as well.