Conformal oxide coating of Carbon Nanotubes
classification
❄️ cond-mat.mtrl-sci
keywords
integrationcarbonelectrodeshigh-dielectricontooxidebottomcoating
read the original abstract
The International Roadmap for Ferroelectric Memories requires three-dimensional integration of high-dielectric materials onto metal interconnects or bottom electrodes by 2010. We report the first integration of high-dielectric oxide films onto carbon nanotube electrodes with an aim of ultra-high integration density of FeRAMs (Tb/in2).
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