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Characterisation of the influence function non-additivities for a 1024-actuator MEMS deformable mirror

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arxiv 1001.5048 v1 pith:NTQ22VK3 submitted 2010-01-27 astro-ph.IM

classification astro-ph.IM
keywords actuatormirroropen-loopcontroldeformableinfluencememsprocess
verification ladder T0 review T1 audit T2 compute T3 formal
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In order to evaluate the potential of MEMS deformable mirrors for open-loop applications, a complete calibration process was performed on a 1024-actuator mirror. The mirror must be perfectly calibrated to obtain deterministic membrane deflection. The actuator's stroke-voltage relationship and the effect of the non- additivity of the influence functions are studied and finally integrated in an open-loop control process. This experiment aimed at minimizing the residual error obtained in open-loop control.

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