Design concepts for an improved integrated scanning SQUID

In this paper we discuss design concepts for increasing the spatial resolution, improving the sensitivity, and reducing the invasiveness in scanning Superconducting Quantum Interference Device (SQUID) microscope sensors with integrated flux pickup loops. This can be done not only by reducing the ground-rule line widths and spacings, but also by taking advantage of planarization, reducing flux noise through reducing the SQUID inductance, and reducing back-action through dispersive readouts or on-chip filtering.