Development of Multilayer Readout Wiring TES Calorimeter for Future X-ray Missions

We have fabricated multilayer readout wiring Transition Edge Sensors (TES), which enable us to realize both large effective area and high-energy resolution for future X-ray astrophysical missions, such as DIOS. By sandwiching a SiO2 insulation layer between Al superconducting signal and return lines, self/mutual inductances and self fielding of bias leads are expected to be reduced. We fabricated 4x4 and 20x20 TES array on the multilayer wiring and tested their performance. Under the low temperature condition, several pixels in the TES array showed sharp superconducting transitions at around ~300 mK. We also succeeded in detecting X-ray signals from the 4x4 TES, contrary to the previous results of 20x20 TES. We further investigated the reasons for the differences between the 4x4 TES and the 20x20 TES, and present future plans for improving the multilayer TES array fabrication.