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Tile-and-trim micro-resonator array fabrication optimized for high multiplexing factors
Instrumentation and Detectors · Submitted 12 Mar 2018
abstract compiled · 2026-09-23 · no language-model review
The authors' main claim We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
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The abstract, sentence by sentence
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250 \; \mu\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
background contribution method result interpretation main claim
| # | sentence | role | the authors' own work | states the main conclusion | strength |
|---|---|---|---|---|---|
| s0 | We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. | contribution 1.00 | 0.92 | 0.34 | asserted 1.00 |
| s1 | The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. | method 0.99 | 0.70 | 0.04 | asserted 1.00 |
| s2 | We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. | contribution 0.60 | 0.95 | 0.06 | asserted 1.00 |
| s3 | Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. | result 0.99 | 0.95 | 0.11 | asserted 1.00 |
| s4 | However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. | result 1.00 | 0.93 | 0.07 | asserted 1.00 |
| s5 | We exploit this finding to increase the yield of the BLAST-TNG $250 \; \mu\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. | contribution 0.50 | 0.93 | 0.20 | asserted 1.00 |
| s6 | This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. | contribution 0.63 | 0.84 | 0.07 | asserted 1.00 |
| s7 | We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies. | result 0.54 | 0.92 | 0.40 | asserted 0.66 |
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Original abstract
We present a superconducting micro-resonator array fabrication method that is scalable, reconfigurable, and has been optimized for high multiplexing factors. The method uses uniformly sized tiles patterned on stepper photolithography reticles as the building blocks of an array. We demonstrate this technique on a 101-element microwave kinetic inductance detector (MKID) array made from a titanium-nitride superconducting film. Characterization reveals 1.5\% maximum fractional frequency spacing deviations caused primarily by material parameters that vary smoothly across the wafer. However, local deviations exhibit a Gaussian distribution in fractional frequency spacing with a standard deviation of $2.7 \times 10^{-3}$. We exploit this finding to increase the yield of the BLAST-TNG $250 \; \mu\text{m}$ production wafer by placing resonators in the array close in both physical and frequency space. This array consists of 1836 polarization-sensitive MKIDs wired in three multiplexing groups. We present the array design and show that the achieved yield is consistent with our model of frequency collisions and is comparable to what has been achieved in other low temperature detector technologies.
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These values are higher in comparison with the value reported of $1.1 ×10^-2$ for identical resonators of TiN built through sputtering [ref] (the resonators are on the same wafer and same MKID).
On the Homogeneity of TiN Kinetic Inductance Detectors Produced through Atomic Layer Deposition · Measurements · 0.97
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