Electrically Tuning Quasi-Bound States in the Continuum with Hybrid Graphene-Silicon Metasurfaces

Metasurfaces have become one of the most prominent research topics in the field of optics owing to their unprecedented properties and novel applications on an ultrathin platform. By combining graphene with metasurfaces, electrical tunable functions can be achieved with fast tuning speed, large modulation depth and broad tuning range. However, the tuning efficiency of hybrid graphene metasurfaces within the short-wavelength infrared (SWIR) spectrum is typically low because of the small resonance wavelength shift in this wavelength range. In this work, through the integration of graphene and silicon metasurfaces that support quasi-bound states in the continuum (quasi-BIC), we experimentally demonstrate significant transmittance tuning even with less than 30 nm resonance wavelength shift thanks to the high quality-factor of quasi-BIC metasurfaces. The tunable transmittance spectrum was measured using Fourier Transform Infrared Spectroscopy (FTIR) with a modified reflective lens to improve the accuracy, and the electrical tuning was realized utilizing the cut-and-stick method of ion gel. At the wavelength of 3.0 um, the measured change of transmittance T_max-T_min and modulation depth (T_max-T_min)/T_max can reach 22.2% and 28.9%, respectively, under a small bias voltage ranging from -2 V to +2 V. To the best of our knowledge, this work is the first experimental demonstration of tunable graphene/quasi-BIC metasurfaces, which have potential applications in optical modulation, reconfigurable photonic devices, and optical communications.