Strongly Electromechanical Coupled Phononic Waveguides in Aluminum Scandium Nitride on Silicon Carbide

Guided phonons have become an increasingly important platform for classical and quantum information processing. While conventional surface acoustic wave systems are typically only guided in the vertical direction, two-dimensionally confined waveguide systems offer significant advantages in terms of density of phononic circuit components and much higher intensities of strain and piezoelectric fields, which make them promising candidates for advancing acoustoelectric and quantum phononic applications. One such material system for generating and guiding phonons at gigahertz frequencies is AlScN on SiC, which can be synthesized by sputter depositing AlScN directly onto SiC wafers. The AlScN on SiC platform allows for tightly vertically confined acoustic modes with high electromechanical coupling, high speed of sound, and simple fabrication of strip and rib waveguides. Until now, this system has only been studied as a slab waveguide platform, i.e., without any lateral waveguiding. Here, we present a 2D-confined phononic waveguide architecture in AlScN on SiC with strongly electromechanically coupled modes that could serve as a platform for phononic routing, power-efficient active and nonlinear phononic devices such as amplifiers, mixers, and oscillators, as well as for interacting with quantum systems such as vacancy centers, charge carriers, photons, and spins. We study two distinct gigahertz frequency waveguide mode families using impedance matched interdigital transducers and characterize their electromechanical coupling and propagation losses. Additionally, we analyze how these waveguides could interact with various important quantum and classical systems that can be either embedded in SiC or heterogeneously integrated on the surface.