pith. machine review for the scientific record. sign in

arxiv: 2602.04831 · v2 · submitted 2026-02-04 · 🪐 quant-ph · cs.SY· eess.SY

Recognition: no theorem link

Review of Superconducting Qubit Devices and Their Large-Scale Integration

Authors on Pith no claims yet

Pith reviewed 2026-05-16 07:08 UTC · model grok-4.3

classification 🪐 quant-ph cs.SYeess.SY
keywords superconducting qubitsJosephson junctionsDiVincenzo criterialarge-scale integrationquantum readouttwo-level systemselectronic design automation
0
0 comments X

The pith

Superconducting qubits form a mature platform for large-scale quantum computers because they align closely with existing semiconductor fabrication methods.

A machine-rendered reading of the paper's core claim, the machinery that carries it, and where it could break.

The paper reviews the basics of superconducting qubits, Josephson junctions, and DiVincenzo's criteria to show how different qubit designs balance noise immunity, entanglement operations, and readout performance. It then covers proposals for scaling these devices to useful sizes, including the application of electronic design automation tools familiar from classical chip manufacturing. A sympathetic reader would care because the work frames superconducting qubits as the quantum architecture closest to leveraging decades of industrial infrastructure, potentially shortening the path to systems large enough for practical computation.

Core claim

Superconducting qubit quantum computers stand out as one of the most promising architectures for large-scale integration due to their maturity and close proximity to the well-established semiconductor manufacturing infrastructure. The review examines qubit types formed with Josephson junctions, entanglement gate schemes, readout engineering with Purcell filters and amplifiers, and the role of two-level system defects in limiting coherence, followed by an overview of integration proposals and the necessary use of electronic design automation for scaling.

What carries the argument

DiVincenzo's criteria applied to Josephson-junction qubits, together with large-scale integration proposals that draw on semiconductor-style electronic design automation.

If this is right

  • Trade-offs in qubit design become clearer for improving noise immunity across multiple parameters.
  • More efficient entanglement gates reduce the overhead for fault-tolerant quantum computing.
  • Purcell filters and quantum-limited amplifiers improve readout fidelity and speed.
  • Better characterization of two-level system defects points to concrete paths for extending coherence times.
  • Electronic design automation tools adapted from semiconductors enable systematic large-scale device layout and verification.

Where Pith is reading between the lines

These are editorial extensions of the paper, not claims the author makes directly.

  • Success in superconducting integration could create hybrid classical-quantum chips that combine control electronics and qubits on the same substrate.
  • Insights from addressing two-level systems here may transfer to coherence challenges in other solid-state qubit platforms.
  • Widespread use of design automation would shift superconducting quantum engineering from manual optimization toward automated, foundry-compatible flows.

Load-bearing premise

The cited literature and integration proposals accurately reflect the current technical state without major unaddressed scalability barriers beyond those discussed.

What would settle it

Demonstration that reviewed integration approaches fail to scale beyond a few hundred qubits while preserving coherence and gate fidelity would falsify the promise of straightforward large-scale integration.

read the original abstract

The superconducting qubit quantum computer is one of the most promising quantum computing architectures for large-scale integration due to its maturity and close proximity to the well-established semiconductor manufacturing infrastructure. From an education perspective, it also bridges classical microwave electronics and quantum electrodynamics. In this paper, we will review the basics of quantum computers, superconductivity, and Josephson junctions. We then introduce important technologies and concepts related to DiVincenzo's criteria, which are the necessary conditions for the superconducting qubits to work as a useful quantum computer. Firstly, we will discuss various types of superconducting qubits formed with Josephson junctions, from which we will understand the trade-off across multiple design parameters, including their noise immunity. Secondly, we will discuss different schemes to achieve entanglement gate operations, which are a major bottleneck in achieving more efficient fault-tolerant quantum computing. Thirdly, we will review readout engineering, including the implementations of the Purcell filters and quantum-limited amplifiers. Finally, we will discuss the nature and review the studies of two-level system defects, which are currently the limiting factor of qubit coherence time. DiVincenzo's criteria are only the necessary conditions for a technology to be eligible for quantum computing. To have a useful quantum computer, large-scale integration is required. We will review proposals and developments for the large-scale integration of superconducting qubit devices. By comparing with the application of electronic design automation (EDA) in semiconductors, we will also review the use of EDA in superconducting qubit quantum computer design, which is necessary for its large-scale integration.

Editorial analysis

A structured set of objections, weighed in public.

Desk editor's note, referee report, simulated authors' rebuttal, and a circularity audit. Tearing a paper down is the easy half of reading it; the pith above is the substance, this is the friction.

Referee Report

0 major / 3 minor

Summary. The manuscript is a review paper that covers the fundamentals of quantum computing, superconductivity, and Josephson junctions before addressing DiVincenzo criteria for superconducting qubits. It surveys qubit types and their noise-immunity trade-offs, entanglement-gate schemes, readout engineering (Purcell filters and quantum-limited amplifiers), two-level system (TLS) defects as a coherence limiter, and proposals for large-scale integration that draw on electronic design automation (EDA) tools from semiconductor manufacturing.

Significance. If the summarization of the cited literature is accurate, the review provides a useful educational synthesis that connects classical microwave engineering with quantum electrodynamics and outlines practical routes to scalability via established fabrication infrastructure. It does not introduce new derivations or predictions but consolidates established knowledge on qubit design parameters, gate bottlenecks, and integration challenges, which can aid researchers entering the field.

minor comments (3)
  1. [TLS defects section] The abstract states that TLS defects are 'currently the limiting factor of qubit coherence time,' but the corresponding section should explicitly reference the most recent coherence-time benchmarks (e.g., T1 or T2 values) from the cited studies to allow readers to assess the claim quantitatively.
  2. [Large-scale integration and EDA section] In the large-scale integration discussion, the comparison to semiconductor EDA would be strengthened by naming at least two specific EDA tools or workflows that have already been applied to superconducting qubit layouts, rather than leaving the analogy at a high level.
  3. [Readout engineering section] Figure captions and axis labels should be checked for consistency with the text (e.g., ensuring that any circuit diagrams for Purcell filters match the described parameters).

Simulated Author's Rebuttal

0 responses · 0 unresolved

We thank the referee for their positive and constructive review. We are pleased that the manuscript is recommended for acceptance and that it is viewed as a useful educational synthesis connecting microwave engineering with quantum electrodynamics.

Circularity Check

0 steps flagged

No significant circularity in this review paper

full rationale

This is a review article that surveys established literature on superconducting qubits, Josephson junctions, DiVincenzo criteria, entanglement gates, Purcell filters, TLS defects, and EDA-assisted scaling without advancing any new derivations, equations, fitted parameters, or predictive claims. The central assertion that superconducting qubits are promising for large-scale integration rests on documented proximity to semiconductor manufacturing and citations to external works; no load-bearing self-citations, self-definitional reductions, or ansatz smuggling occur. All content enumerates known trade-offs and criteria from prior independent sources, making the manuscript self-contained against external benchmarks with no internal loops.

Axiom & Free-Parameter Ledger

0 free parameters · 0 axioms · 0 invented entities

No free parameters, axioms, or invented entities are introduced because the work is a literature review rather than an original derivation or model.

pith-pipeline@v0.9.0 · 5571 in / 1007 out tokens · 33896 ms · 2026-05-16T07:08:10.051672+00:00 · methodology

discussion (0)

Sign in with ORCID, Apple, or X to comment. Anyone can read and Pith papers without signing in.

Reference graph

Works this paper leans on

229 extracted references · 229 canonical work pages · 2 internal anchors

  1. [1]

    H. Y. Wong, Introduction to Quantum Computing: From a Layperson to a Programmer in 30 Steps. Cham: Springer International Publishing, 2024. doi: 10.1007/978-3-031-36985-8

  2. [2]

    Polynomial-Time Algorithms for Prime Factorization and Discrete Logarithms on a Quantum Computer,

    P. W. Shor, “Polynomial-Time Algorithms for Prime Factorization and Discrete Logarithms on a Quantum Computer,” SIAM J. Comput., vol. 26, no. 5, pp. 1484–1509, Oct. 1997, doi: 10.1137/S0097539795293172

  3. [3]

    The vast world of quantum advantage,

    H.-Y. Huang, S. Choi, J. R. McClean, and J. Preskill, “The vast world of quantum advantage,” 2025, arXiv. doi: 10.48550/ARXIV.2508.05720

  4. [4]

    Exponential quantum communication advantage in distributed inference and learning,

    D. Gilboa, H. Michaeli, D. Soudry, and J. R. McClean, “Exponential quantum communication advantage in distributed inference and learning,” in Proceedings of the 38th International Conference on Neural Information Processing Systems, in NIPS ’24. Red Hook, NY, USA: Curran Associates Inc., 2024

  5. [5]

    Quantum Algorithm for Linear Systems of Equations,

    A. W. Harrow, A. Hassidim, and S. Lloyd, “Quantum Algorithm for Linear Systems of Equations,” Phys. Rev. Lett., vol. 103, no. 15, p. 150502, Oct. 2009, doi: 10.1103/PhysRevLett.103.150502

  6. [6]

    Zaman, H

    A. Zaman, H. J. Morrell, and H. Y. Wong, “A Step-by-Step HHL Algorithm Walkthrough to Enhance Understanding of Critical FIGURE 26. Integration scheme by bonding a full wafer with 20,000 qubits to a wiring wafer at 20mK. It is connected to cryogenic CMOS at 3K. The wiring wafer is selectively thinned to provide thermal insulation between 20mK and 3K. Modif...

  7. [7]

    The Physical Implementation of Quantum Computation,

    D. P. DiVincenzo, “The Physical Implementation of Quantum Computation,” Fortschritte Phys., vol. 48, no. 9–11, pp. 771–783, Sep. 2000, doi: 10.1002/1521-3978(200009)48:9/11<771::AID- PROP771>3.0.CO;2-E

  8. [8]

    Study of Error Propagation and Generation in Harrow-Hassidim-Lloyd (HHL) Quantum Algorithm,

    A. Zaman and H. Y. Wong, “Study of Error Propagation and Generation in Harrow-Hassidim-Lloyd (HHL) Quantum Algorithm,” in 2022 IEEE Latin American Electron Devices Conference (LAEDC), Cancun, Mexico: IEEE, Jul. 2022, pp. 1–4. doi: 10.1109/LAEDC54796.2022.9908231

  9. [9]

    Surface codes: Towards practical large-scale quantum computation,

    A. G. Fowler, M. Mariantoni, J. M. Martinis, and A. N. Cleland, “Surface codes: Towards practical large-scale quantum computation,” Phys. Rev. A, vol. 86, no. 3, p. 032324, Sep. 2012, doi: 10.1103/PhysRevA.86.032324

  10. [10]

    How to factor 2048 bit RSA integers with less than a million noisy qubits

    C. Gidney, “How to factor 2048 bit RSA integers with less than a million noisy qubits,” 2025, arXiv. doi: 10.48550/ARXIV.2505.15917

  11. [11]

    How to factor 2048 bit RSA integers in 8 hours using 20 million noisy qubits,

    C. Gidney and M. Ekerå, “How to factor 2048 bit RSA integers in 8 hours using 20 million noisy qubits,” Quantum, vol. 5, p. 433, Apr. 2021, doi: 10.22331/q-2021-04-15-433

  12. [12]

    Elucidating reaction mechanisms on quantum computers,

    M. Reiher, N. Wiebe, K. M. Svore, D. Wecker, and M. Troyer, “Elucidating reaction mechanisms on quantum computers,” Proc. Natl. Acad. Sci., vol. 114, no. 29, pp. 7555–7560, Jul. 2017, doi: 10.1073/pnas.1619152114

  13. [13]

    Rigetti Demonstrates Industry’s Largest Multi-Chip Quantum

    “Rigetti Demonstrates Industry’s Largest Multi-Chip Quantum.” Accessed: Dec. 06, 2025. [Online]. Available: https://investors.rigetti.com/news-releases/news-release-details/rigetti- demonstrates-industrys-largest-multi-chip-quantum

  14. [14]

    H. Y. Wong, Quantum Computing Architecture and Hardware for Engineers: Step by Step. Cham: Springer Nature Switzerland, 2025. doi: 10.1007/978-3-031-78219-0

  15. [15]

    An addressable quantum dot qubit with fault-tolerant control-fidelity,

    M. Veldhorst et al., “An addressable quantum dot qubit with fault-tolerant control-fidelity,” Nat. Nanotechnol., vol. 9, no. 12, pp. 981– 985, Dec. 2014, doi: 10.1038/nnano.2014.216

  16. [16]

    A manufacturable platform for photonic quantum computing,

    PsiQuantum team et al., “A manufacturable platform for photonic quantum computing,” Nature, vol. 641, no. 8064, pp. 876–883, May 2025, doi: 10.1038/s41586-025-08820-7

  17. [17]

    Single qubit manipulation in a microfabricated surface electrode ion trap,

    E. Mount et al., “Single qubit manipulation in a microfabricated surface electrode ion trap,” New J. Phys., vol. 15, no. 9, p. 093018, Sep. 2013, doi: 10.1088/1367-2630/15/9/093018

  18. [18]

    Quantum Computing Architecture and Hardware for Engineers -- Step by Step -- Volume II,

    H. Y. Wong, “Quantum Computing Architecture and Hardware for Engineers -- Step by Step -- Volume II,” 2025, arXiv. doi: 10.48550/ARXIV.2506.23379

  19. [19]

    Quantum Startup Atom Computing First to Exceed 1,000 Qubits

    “Quantum Startup Atom Computing First to Exceed 1,000 Qubits.” Accessed: Dec. 06, 2025. [Online]. Available: https://thequantuminsider.com/2023/10/24/quantum-startup-atom- computing-first-to-exceed-1000-qubits/

  20. [20]

    Evaluating the performance of quantum processing units at large width and depth,

    J. A. Montanez-Barrera, K. Michielsen, and D. E. B. Neira, “Evaluating the performance of quantum processing units at large width and depth,” 2025, arXiv. doi: 10.48550/ARXIV.2502.06471

  21. [21]

    doi:10.1038/s41586-024-08449-y

    Google Quantum AI and Collaborators et al., “Quantum error correction below the surface code threshold,” Nature, vol. 638, no. 8052, pp. 920–926, Feb. 2025, doi: 10.1038/s41586-024-08449-y

  22. [22]

    Qubit metrology for building a fault-tolerant quantum computer,

    J. M. Martinis, “Qubit metrology for building a fault-tolerant quantum computer,” Npj Quantum Inf., vol. 1, no. 1, pp. 15005, npjqi.2015.5, Oct. 2015, doi: 10.1038/npjqi.2015.5

  23. [23]

    Building logical qubits in a superconducting quantum computing system,

    J. M. Gambetta, J. M. Chow, and M. Steffen, “Building logical qubits in a superconducting quantum computing system,” Npj Quantum Inf., vol. 3, no. 1, p. 2, Jan. 2017, doi: 10.1038/s41534-016-0004-0

  24. [24]

    RSFQ logic/memory family: a new Josephson-junction technology for sub-terahertz-clock- frequency digital systems,

    K. K. Likharev and V. K. Semenov, “RSFQ logic/memory family: a new Josephson-junction technology for sub-terahertz-clock- frequency digital systems,” IEEE Trans. Appl. Supercond., vol. 1, no. 1, pp. 3–28, Mar. 1991, doi: 10.1109/77.80745

  25. [25]

    Moving beyond the Transmon: Noise-Protected Superconducting Quantum Circuits,

    A. Gyenis, A. Di Paolo, J. Koch, A. Blais, A. A. Houck, and D. I. Schuster, “Moving beyond the Transmon: Noise-Protected Superconducting Quantum Circuits,” PRX Quantum, vol. 2, no. 3, p. 030101, Sep. 2021, doi: 10.1103/PRXQuantum.2.030101

  26. [26]

    M. A. Nielsen and I. L. Chuang, Quantum computation and quantum information, 10th anniversary edition. Cambridge: Cambridge university press, 2010

  27. [27]

    Razavi, RF microelectronics, 2

    B. Razavi, RF microelectronics, 2. edition. in The Prentice Hall communications engineering and emerging technologies series. Upper Saddle River, NJ Munich: Prentice Hall, 2012

  28. [28]

    Charge-insensitive qubit design derived from the Cooper pair box,

    J. Koch et al., “Charge-insensitive qubit design derived from the Cooper pair box,” Phys. Rev. A, vol. 76, no. 4, p. 042319, Oct. 2007, doi: 10.1103/PhysRevA.76.042319

  29. [29]

    D. M. Pozar, Microwave engineering, Fourth edition. Hoboken, NJ: John Wiley & Sons, Inc, 2012

  30. [30]

    Tinkham, Introduction to superconductivity, 2 ed

    M. Tinkham, Introduction to superconductivity, 2 ed. in Dover books on physics. Mineola, NY: Dover Publ, 2015

  31. [31]

    Van Duzer, C

    T. Van Duzer, C. W. Turner, and C. W. Turner, Principles of superconductive devices and circuits, 2. ed. Upper Saddle River, NJ: Prentice Hall, 1999

  32. [32]

    Fast Readout and Reset of a Superconducting Qubit Coupled to a Resonator with an Intrinsic Purcell Filter,

    Y. Sunada et al., “Fast Readout and Reset of a Superconducting Qubit Coupled to a Resonator with an Intrinsic Purcell Filter,” Phys. Rev. Appl., vol. 17, no. 4, p. 044016, Apr. 2022, doi: 10.1103/PhysRevApplied.17.044016

  33. [33]

    Rapid High-Fidelity Single-Shot Dispersive Readout of Superconducting Qubits,

    T. Walter et al., “Rapid High-Fidelity Single-Shot Dispersive Readout of Superconducting Qubits,” Phys. Rev. Appl., vol. 7, no. 5, p. 054020, May 2017, doi: 10.1103/PhysRevApplied.7.054020

  34. [34]

    In situ scanning gate imaging of individual quantum two-level system defects in live superconducting circuits,

    M. Hegedüs et al., “In situ scanning gate imaging of individual quantum two-level system defects in live superconducting circuits,” Sci. Adv., vol. 11, no. 18, p. eadt8586, May 2025, doi: 10.1126/sciadv.adt8586

  35. [35]

    Millisecond lifetimes and coherence times in 2D transmon qubits,

    M. P. Bland et al., “Millisecond lifetimes and coherence times in 2D transmon qubits,” Nature, vol. 647, no. 8089, pp. 343–348, Nov. 2025, doi: 10.1038/s41586-025-09687-4

  36. [36]

    Doubling the superconducting transition temperature of ultraclean wafer-scale aluminum nanofilms,

    C.-C. Yeh et al., “Doubling the superconducting transition temperature of ultraclean wafer-scale aluminum nanofilms,” Phys. Rev. Mater., vol. 7, no. 11, p. 114801, Nov. 2023, doi: 10.1103/PhysRevMaterials.7.114801

  37. [37]

    Critical-Field Study of Superconducting Aluminum,

    S. Caplan and G. Chanin, “Critical-Field Study of Superconducting Aluminum,” Phys. Rev., vol. 138, no. 5A, pp. A1428– A1433, May 1965, doi: 10.1103/PhysRev.138.A1428

  38. [38]

    Critical temperature of niobium and tantalum films,

    J. R. Rairden and C. A. Neugebauer, “Critical temperature of niobium and tantalum films,” Proc. IEEE, vol. 52, no. 10, pp. 1234–1238, 1964, doi: 10.1109/PROC.1964.3311

  39. [39]

    Suppression of superconductivity in epitaxial NbN ultrathin films,

    L. Kang et al., “Suppression of superconductivity in epitaxial NbN ultrathin films,” J. Appl. Phys., vol. 109, no. 3, p. 033908, Feb. 2011, doi: 10.1063/1.3518037

  40. [40]

    Superconducting penetration depth of aluminum thin films,

    D. López-Núñez et al., “Superconducting penetration depth of aluminum thin films,” Supercond. Sci. Technol., vol. 38, no. 9, p. 095004, Sep. 2025, doi: 10.1088/1361-6668/adf360

  41. [41]

    Upper critical field in nanostructured Nb: Competing effects of the reduction in density of states and the mean free path,

    S. Bose, P. Raychaudhuri, R. Banerjee, and P. Ayyub, “Upper critical field in nanostructured Nb: Competing effects of the reduction in density of states and the mean free path,” Phys. Rev. B, vol. 74, no. 22, p. 224502, Dec. 2006, doi: 10.1103/PhysRevB.74.224502

  42. [42]

    Measurement of Magnetic Field Penetration Depth in Niobium Polycrystalline Films by the Polarized Neutron Reflection Method,

    L. P. Chernenko, D. A. Korneev, A. V. Petrenko, N. I. Balalykin, and A. V. Skripnik, “Measurement of Magnetic Field Penetration Depth in Niobium Polycrystalline Films by the Polarized Neutron Reflection Method,” in Surface X-Ray and Neutron Scattering, vol. 61, H. Zabel and I. K. Robinson, Eds., in Springer Proceedings in Physics, vol. 61. , Berlin, Heide...

  43. [43]

    High upper critical field in disordered niobium nitride superconductor,

    R. Baskaran, A. V. Thanikai Arasu, E. P. Amaladass, and M. P. Janawadkar, “High upper critical field in disordered niobium nitride superconductor,” J. Appl. Phys., vol. 116, no. 16, p. 163908, Oct. 2014, doi: 10.1063/1.4900436

  44. [44]

    Inductance and penetration depth measurements of polycrystalline NbN films for all-NbN single flux quantum circuits,

    Y. Zhong et al., “Inductance and penetration depth measurements of polycrystalline NbN films for all-NbN single flux quantum circuits,” Supercond. Sci. Technol., vol. 38, no. 1, p. 015001, Jan. 2025, doi: 10.1088/1361-6668/ad941a

  45. [45]

    Critical Fields of Superconducting Tin, Indium, and Tantalum,

    R. W. Shaw, D. E. Mapother, and D. C. Hopkins, “Critical Fields of Superconducting Tin, Indium, and Tantalum,” Phys. Rev., vol. 120, no. 1, pp. 88–91, Oct. 1960, doi: 10.1103/PhysRev.120.88

  46. [46]

    Low-loss superconducting resonators fabricated from tantalum films grown at room temperature,

    G. Marcaud et al., “Low-loss superconducting resonators fabricated from tantalum films grown at room temperature,” Commun. Mater., vol. 6, no. 1, p. 182, Aug. 2025, doi: 10.1038/s43246-025-00897- x

  47. [47]

    The penetration depth in several hard superconductors,

    T. J. Greytak and J. H. Wernick, “The penetration depth in several hard superconductors,” J. Phys. Chem. Solids, vol. 25, no. 6, pp. 535–542, Jun. 1964, doi: 10.1016/0022-3697(64)90141-6

  48. [48]

    Giant drop in the Bardeen-Cooper-Schrieffer coherence length induced by quantum size effects in superconducting nanowires,

    A. A. Shanenko, M. D. Croitoru, A. Vagov, and F. M. Peeters, “Giant drop in the Bardeen-Cooper-Schrieffer coherence length induced by quantum size effects in superconducting nanowires,” Phys. Rev. B, vol. 82, no. 10, p. 104524, Sep. 2010, doi: 10.1103/PhysRevB.82.104524

  49. [49]

    Niobium’s intrinsic coherence length and penetration depth revisited using low-energy muon spin spectroscopy,

    R. M. L. McFadden et al., “Niobium’s intrinsic coherence length and penetration depth revisited using low-energy muon spin spectroscopy,” 2025, arXiv. doi: 10.48550/ARXIV.2511.02913

  50. [50]

    Enlargement of Kinetic Inductance of NbN Superconducting Thin Films for Device Applications,

    M. S. Hossain, K. Yoshida, K. Kudo, K. E. Keiji Enpuku, and K. Y. Kaoru Yamafuji, “Enlargement of Kinetic Inductance of NbN Superconducting Thin Films for Device Applications,” Jpn. J. Appl. Phys., vol. 31, no. 4R, p. 1033, Apr. 1992, doi: 10.1143/JJAP.31.1033

  51. [51]

    Tunneling Between Superconductors,

    V. Ambegaokar and A. Baratoff, “Tunneling Between Superconductors,” Phys. Rev. Lett., vol. 10, no. 11, pp. 486–489, Jun. 1963, doi: 10.1103/PhysRevLett.10.486

  52. [52]

    Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers,

    J. Van Damme et al., “Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers,” Nature, vol. 634, no. 8032, pp. 74–79, Oct. 2024, doi: 10.1038/s41586-024-07941-9

  53. [53]

    Decoherence in a pair of long-lived Cooper-pair boxes,

    V. Zaretskey, S. Novikov, B. Suri, Z. Kim, F. C. Wellstood, and B. S. Palmer, “Decoherence in a pair of long-lived Cooper-pair boxes,” J. Appl. Phys., vol. 114, no. 9, p. 094305, Sep. 2013, doi: 10.1063/1.4820260

  54. [54]

    Offset masks for lift-off photoprocessing,

    G. J. Dolan, “Offset masks for lift-off photoprocessing,” Appl. Phys. Lett., vol. 31, no. 5, pp. 337–339, Sep. 1977, doi: 10.1063/1.89690

  55. [55]

    CMOS compatible fabrication methods for submicron Josephson junction qubits,

    G. J. Parker, A. Potts, J. J. Baumberg, and P. A. J. De Groot, “CMOS compatible fabrication methods for submicron Josephson junction qubits,” IEE Proc. - Sci. Meas. Technol., vol. 148, no. 5, pp. 225–228, Sep. 2001, doi: 10.1049/ip-smt:20010395

  56. [56]

    Improving Josephson junction reproducibility for superconducting quantum circuits: junction area fluctuation,

    A. A. Pishchimova et al., “Improving Josephson junction reproducibility for superconducting quantum circuits: junction area fluctuation,” Sci. Rep., vol. 13, no. 1, p. 6772, Apr. 2023, doi: 10.1038/s41598-023-34051-9

  57. [57]

    Wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan-style Josephson junctions for superconducting quantum processors,

    N. Muthusubramanian et al., “Wafer-scale uniformity of Dolan-bridge and bridgeless Manhattan-style Josephson junctions for superconducting quantum processors,” Quantum Sci. Technol., vol. 9, no. 2, p. 025006, Apr. 2024, doi: 10.1088/2058-9565/ad199c

  58. [58]

    Fabrication Process for RSFQ/Qubit Systems,

    L. Gronberg, J. Hassel, P. Helisto, and M. Ylilammi, “Fabrication Process for RSFQ/Qubit Systems,” IEEE Trans. Appl. Supercond., vol. 17, no. 2, pp. 952–954, Jun. 2007, doi: 10.1109/TASC.2007.897721

  59. [59]

    Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers,

    D. Wan et al., “Fabrication and room temperature characterization of trilayer junctions for the development of superconducting qubits on 300 mm wafers,” Jpn. J. Appl. Phys., vol. 60, no. SB, p. SBBI04, May 2021, doi: 10.35848/1347-4065/abe5bb

  60. [60]

    Overlap junctions for high coherence superconducting qubits,

    X. Wu, J. L. Long, H. S. Ku, R. E. Lake, M. Bal, and D. P. Pappas, “Overlap junctions for high coherence superconducting qubits,” Appl. Phys. Lett., vol. 111, no. 3, p. 032602, Jul. 2017, doi: 10.1063/1.4993937

  61. [61]

    Scaffold-Assisted Window Junctions for Superconducting Qubit Fabrication,

    C.-T. Ke et al., “Scaffold-Assisted Window Junctions for Superconducting Qubit Fabrication,” 2025, arXiv. doi: 10.48550/ARXIV.2503.11010

  62. [62]

    Two-Dimensional van der Waals Superconductor Heterostructures: Josephson Junctions and Beyond,

    C. Wang, Z. Zhou, and L. Gao, “Two-Dimensional van der Waals Superconductor Heterostructures: Josephson Junctions and Beyond,” Precis. Chem., vol. 2, no. 7, pp. 273–281, Jul. 2024, doi: 10.1021/prechem.3c00126

  63. [63]

    Two-Dimensional Material Tunnel Barrier for Josephson Junctions and Superconducting Qubits,

    K.-H. Lee et al., “Two-Dimensional Material Tunnel Barrier for Josephson Junctions and Superconducting Qubits,” Nano Lett., vol. 19, no. 11, pp. 8287–8293, Nov. 2019, doi: 10.1021/acs.nanolett.9b03886

  64. [64]

    Elimination of two level fluctuators in superconducting quantum bits by an epitaxial tunnel barrier,

    S. Oh et al., “Elimination of two level fluctuators in superconducting quantum bits by an epitaxial tunnel barrier,” Phys. Rev. B, vol. 74, no. 10, p. 100502, Sep. 2006, doi: 10.1103/PhysRevB.74.100502

  65. [65]

    Superconducting qubits consisting of epitaxially grown NbN/AlN/NbN Josephson junctions,

    Y. Nakamura, H. Terai, K. Inomata, T. Yamamoto, W. Qiu, and Z. Wang, “Superconducting qubits consisting of epitaxially grown NbN/AlN/NbN Josephson junctions,” Appl. Phys. Lett., vol. 99, no. 21, p. 212502, Nov. 2011, doi: 10.1063/1.3663539

  66. [66]

    Laser-annealing Josephson junctions for yielding scaled-up superconducting quantum processors,

    J. B. Hertzberg et al., “Laser-annealing Josephson junctions for yielding scaled-up superconducting quantum processors,” Npj Quantum Inf., vol. 7, no. 1, p. 129, Aug. 2021, doi: 10.1038/s41534-021-00464-5

  67. [67]

    Superconducting Circuits for Quantum Information: An Outlook,

    M. H. Devoret and R. J. Schoelkopf, “Superconducting Circuits for Quantum Information: An Outlook,” Science, vol. 339, no. 6124, pp. 1169–1174, Mar. 2013, doi: 10.1126/science.1231930

  68. [68]

    A quantum engineer’s guide to superconducting qubits,

    P. Krantz, M. Kjaergaard, F. Yan, T. P. Orlando, S. Gustavsson, and W. D. Oliver, “A quantum engineer’s guide to superconducting qubits,” Appl. Phys. Rev., vol. 6, no. 2, p. 021318, Jun. 2019, doi: 10.1063/1.5089550

  69. [69]

    Quantum Coherence with a Single Cooper Pair,

    V. Bouchiat, D. Vion, P. Joyez, D. Esteve, and M. H. Devoret, “Quantum Coherence with a Single Cooper Pair,” Phys. Scr., vol. T76, no. 1, p. 165, 1998, doi: 10.1238/Physica.Topical.076a00165

  70. [70]

    Coherent control of macroscopic quantum states in a single-Cooper-pair box,

    Y. Nakamura, Yu. A. Pashkin, and J. S. Tsai, “Coherent control of macroscopic quantum states in a single-Cooper-pair box,” Nature, vol. 398, no. 6730, pp. 786–788, Apr. 1999, doi: 10.1038/19718

  71. [71]

    Decoherence in a superconducting quantum bit circuit,

    G. Ithier et al., “Decoherence in a superconducting quantum bit circuit,” Phys. Rev. B, vol. 72, no. 13, p. 134519, Oct. 2005, doi: 10.1103/PhysRevB.72.134519

  72. [72]

    Circuit quantum electrodynamics,

    A. Blais, A. L. Grimsmo, S. M. Girvin, and A. Wallraff, “Circuit quantum electrodynamics,” Rev. Mod. Phys., vol. 93, no. 2, p. 025005, May 2021, doi: 10.1103/RevModPhys.93.025005

  73. [73]

    The IBM Quantum roadmap

    “The IBM Quantum roadmap.” Accessed: Dec. 06, 2025. [Online]. Available: https://www.ibm.com/quantum/hardware?utm_source=chatgpt.com#road map

  74. [74]

    Quantum supremacy using a programmable superconducting processor,

    F. Arute et al., “Quantum supremacy using a programmable superconducting processor,” Nature, vol. 574, no. 7779, pp. 505–510, Oct. 2019, doi: 10.1038/s41586-019-1666-5

  75. [75]

    New material platform for superconducting transmon qubits with coherence times exceeding 0.3 milliseconds,

    A. P. M. Place et al., “New material platform for superconducting transmon qubits with coherence times exceeding 0.3 milliseconds,” Nat. Commun., vol. 12, no. 1, p. 1779, Mar. 2021, doi: 10.1038/s41467-021-22030-5

  76. [76]

    Study of Phase Method in Tantalum Superconducting Qubit T2 * Measurements,

    H. Y. Wong, K. M. Beck, V. M. Iaia, A. Zaman, and Y. J. Rosen, “Study of Phase Method in Tantalum Superconducting Qubit T2 * Measurements,” in 2024 IEEE International Conference on Quantum Computing and Engineering (QCE), Montreal, QC, Canada: IEEE, Sep. 2024, pp. 1295–1303. doi: 10.1109/QCE60285.2024.00154

  77. [77]

    A. M. Zagoskin, Quantum engineering: theory and design of quantum coherent structures. Cambridge New York: Cambridge University Press, 2011

  78. [78]

    Energy-Level Quantization in the Zero-Voltage State of a Current-Biased Josephson Junction,

    J. M. Martinis, M. H. Devoret, and J. Clarke, “Energy-Level Quantization in the Zero-Voltage State of a Current-Biased Josephson Junction,” Phys. Rev. Lett., vol. 55, no. 15, pp. 1543–1546, Oct. 1985, doi: 10.1103/PhysRevLett.55.1543

  79. [79]

    1 / f Flux Noise in Josephson Phase Qubits,

    R. C. Bialczak et al., “1 / f Flux Noise in Josephson Phase Qubits,” Phys. Rev. Lett., vol. 99, no. 18, p. 187006, Nov. 2007, doi: 10.1103/PhysRevLett.99.187006

  80. [80]

    Superconducting phase qubits,

    J. M. Martinis, “Superconducting phase qubits,” Quantum Inf. Process., vol. 8, no. 2–3, pp. 81–103, Jun. 2009, doi: 10.1007/s11128-009- 0105-1

Showing first 80 references.